Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

Conference paper (2007)

Authors

Henk van Zeijl Electronic Components, Technology and Materials - EEMCS
SL Paalvast Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J Su External organisation
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Lina Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials