Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners

Conference paper (2017)

Authors

A. Jovic Electronic Components, Technology and Materials -

G. Pandraud EKL Processing -

Nuria Sanchez MedLumics

Juan Sancho MedLumics

Kirill Zinoviev IMEC

Jose L. Rubio MedLumics

Eduardo Margallo MedLumics

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Silicon Actuators Lenses Optical imaging Optical device fabrication Fasteners Micromechanical devices

To reference this document use:

http://resolver.tudelft.nl/uuid:b8a90b6d-8dec-48be-a954-5bb28cf786ed

More Info

expand_more

Published Date

23-02-2017

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Two novel MEMS actuator systems (a torsional one and a deflecting one) for a new self-aligned integrated 3D optical coherent tomography (OCT) scanner are reported. These new systems, with a footprint of 2.5mm×2.5 mm each, provide a χ and y scanning range of 730 μm (tilting range of 8°) with an average power consumption of 150 mW. As the device integrates a silicon collimating micro lens, an optical waveguide and a MEMS actuator system on a single chip, it provides a considerable decrease in optical losses thanks to the intrinsic alignment obtained during fabrication, while significantly reducing the complexity and time that assembly and packaging of separate components demand, therefore making fully integrated, miniaturized 3D OCT scanners feasible.

Files

07863528.pdf

(pdf | 2.39 Mb)

Download not available