Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones

Conference paper (2023)

Authors

R. Pezone Electronic Components, Technology and Materials - EEMCS
G. Baglioni QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , Kavli institute of nanoscience Delft
S. Vollebregt Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2023

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.

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File under embargo until 07-11-2024