Tuning dynamics and dissipation dilution in 2D material resonators by MEMS-induced tension

Master thesis (2024)

Authors

M.P.F. Wopereis Mechanical Engineering

Contributors

P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering (mentor)
G.J. Verbiest Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering (mentor)
F. Alijani Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering (mentor)
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering (graduation committee member)
S. Vollebregt Electronic Components, Technology and Materials - EEMCS (graduation committee member)
Faculty
Mechanical Engineering, Mechanical Engineering
Copyright: © 2024 Michiel Wopereis
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Published Date

11-01-2024

Language

English

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Faculty

Mechanical Engineering

Abstract

Nanomechanical resonators made of two-dimensional (2D) materials are the subject of intensive research due to their remarkable properties, allowing them to operate at high frequencies with high sensitivity. However, dissipation losses and manufacturing issues have prevented them from reaching their full potential. This thesis aims to overcome these challenges by dry-transferring 2D materials onto a MEMS and clamping them using electron beam-induced deposition. By in-plane straining the membranes using MEMS, the tensile energy is increased, thereby diluting intrinsic losses. This approach increased the Q-factor of 2D material resonators by 91% and allowed measuring forces down to sub-piconewtons, outperforming commercially available silicon-based force sensors.

Files

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