Ptychography with multiple wavelength illumination

Journal article (2019)

Authors

X. Wei ImPhys/Optics - AS
Hendrik Paul Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
Copyright: © 2019 X. Wei, Paul Urbach
DOI: https://doi.org/10.1364/OE.27.036767
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Published Date

2019

Language

English

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Abstract

For performing phase retrieval in the extreme ultraviolet (EUV) regime more efficiently, developing polychromatic ptychography is desirable. As an alternative to the existing ptychographic information multiplexing (PIM) method, we present an another scheme where all monochromatic exit waves are expressed in terms of the amplitude of the transmission function and the thickness function of the object. Our proposed algorithm is a gradient based method and its validity is studied numerically. In addition, the sampling issue which appears in the polychromatic ptychography scheme and its influence to the reconstruction quality are discussed.

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