Minimizing stress in large-area surface micromachined perforated membranes with slits

Journal article (2015)

Authors

M. Ghaderi Electronic Instrumentation - EEMCS
N.P. Ayerden Electronic Instrumentation - EEMCS
G. de Graaf Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation