Minimizing stress in large-area surface micromachined perforated membranes with slits

Journal article (2015)

Authors

M. Ghaderi Electronic Instrumentation
N.P. Ayerden Electronic Instrumentation
G. de de Graaf Electronic Instrumentation
RF Wolfenbuttel Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2015

Language

English

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Research Group

Electronic Instrumentation

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