Graphene gas pumps

Conference paper (2018)

Authors

D. Davidovikj QN/Steeneken Lab, QN/van der Zant Lab
Herre Van Der Van Der Zant QN/van der Zant Lab
P.G. Steeneken Dynamics of Micro and Nano Systems, QN/Steeneken Lab
Research Group
QN/Steeneken Lab
Copyright: © 2018 D. Davidovikj, Damian Bouwmeester, H.S.J. van der Zant, P.G. Steeneken
DOI: https://doi.org/10.1109/MEMSYS.2018.8346632
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Published Date

2018

Language

English

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Research Group

QN/Steeneken Lab

Abstract

We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

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