Local stress analysis on semiconductor devices by combined experimental-numerical procedure

Kregting, René; Gielen, Sander; van Driel, W; Alkemade, Paul; Miro, Hozanna; Kamminga, J.D.

Local stress analysis on semiconductor devices by combined experimental-numerical procedure

Journal article (2011)

Authors

René Kregting External organisation

Sander Gielen External organisation

W van Driel External organisation

Paul Alkemade QN/Kavli Nanolab Delft, QN/Fysics of NanoElectronics, QN/High Resolution Electron Microscopy

Hozanna Miro QN/Kavli Nanolab Delft

J.D. Kamminga OLD Surface and Interface Engineering

Research Group

QN/High Resolution Electron Microscopy

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Published Date

2011

Language

English

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Research Group

QN/High Resolution Electron Microscopy

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