Compensation of High-Frequency Disturbances in Scanning Microscopes

Book chapter (2012)

Authors

P. Kruit ImPhys/Charged Particle Optics
V.F. van Ravesteijn ImPhys/Quantitative Imaging
B. Rieger ImPhys/Quantitative Imaging
F. Berwald ImPhys/Charged Particle Optics
J.H.M. van der Linden ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2012

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics