Effects of capping layer on grain growth with ¿-Czochralski process during excimer laser crystallization

He, M; Ishihara, R.; Hiroshima, Y; Inoue, S; Shimoda, T; Metselaar, JW; Beenakker, C. W J

Effects of capping layer on grain growth with ¿-Czochralski process during excimer laser crystallization

Journal article (2006)

Authors

M He Electronic Components, Technology and Materials

R. Ishihara Electronic Components, Technology and Materials

Y Hiroshima External organisation

S Inoue External organisation

T Shimoda External organisation

JW Metselaar Electronic Components, Technology and Materials

C. W J Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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2006

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Research Group

Electronic Components, Technology and Materials

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