Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster.

Journal article (1998)

Authors

Kas Hemmes OLD Surface and Interface Engineering
A Hamstra External organisation
KR Koops External organisation
MM Wind External organisation
T Schram External organisation
J de Laet External organisation
H Bender External organisation
Research Group
OLD Surface and Interface Engineering
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Published Date

1998

Language

Undefined/Unknown

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Research Group

OLD Surface and Interface Engineering