Effects of crystallographic orientation of single-crystalline seed on ¿-Czochralski process in excimer-laser crystallization

He, M; Ishihara, R.; Hiroshima, Y; Inoue, S; Shimoda, T; Metselaar, JW; Tsukamoto, S; Beenakker, C.I.M.; van Aandel, Y

Effects of crystallographic orientation of single-crystalline seed on ¿-Czochralski process in excimer-laser crystallization

Conference paper (2005)

Authors

M He Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

Y Hiroshima External organisation

S Inoue External organisation

T Shimoda External organisation

JW Metselaar Electronic Components, Technology and Materials -

S Tsukamoto External organisation

C.I.M. Beenakker Electronic Components, Technology and Materials -

Y van Aandel External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:a1e9aebd-c4a7-47e4-b479-483fd57545b9

More Info

expand_more

Published Date

2005

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials