Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Journal article (2003)

Authors

DW de Lima Monteiro Electronic Instrumentation - EEMCS
O Akhzar-Mehr External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Gleb Vdovin Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation