Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

Conference paper (2020)

Authors

B. Ouyang ImPhys/Computational Imaging - AS
Yanlu Li Universiteit Gent
R.C. Horsten ImPhys/Optics - AS
Roel Baets Universiteit Gent
K.W.A. van Dongen ImPhys/Medical Imaging - AS
J. Caro ImPhys/Computational Imaging - AS
Research Group
ImPhys/Computational Imaging (AS) (TU Delft)
Copyright: © 2020 B. Ouyang, Yanlu Li, Marten Kruidhof, R.C. Horsten, Roel Baets, K.W.A. van Dongen, J. Caro-Schuurman
DOI: https://doi.org/10.1117/12.2539573
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Published Date

2020

Language

English

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Computational Imaging

Abstract

We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor transfer function is centered at 0.47 MHz and has a -6 dB bandwidth of 21.2%. For 1.0 mW optical input power, we obtain a high sensitivity of 0.62 mV/Pa, a low detection limit of 0.38 mPa/Hz1/2 at the resonance frequency and a large dynamic range of 59 dB. In preliminary ultrasound imaging experiments using this sensor, an image of a wire phantom is obtained. The properties of this sensor and the generated image show that this sensor is very promising for ultrasound imaging applications.

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