Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

Journal article (2015)

Authors

K. Ushakova ImPhys/Optics - AS
QY Berg External organisation
SF Pereira ImPhys/Optics - AS
H. P. Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics