Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

Ushakova, K.; Berg, QY; Pereira, Silvania F.; Paul Urbach, H.

Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

Journal article (2015)

Authors

K. Ushakova ImPhys/Optics

QY Berg External organisation

Silvania F. Pereira ImPhys/Optics

H. Paul Urbach ImPhys/Optics

Research Group

ImPhys/Optics

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Published Date

2015

Language

English

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Research Group

ImPhys/Optics

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