Controlled Growth of Non-uniform Arsenic Profiles in Silicon RPCVD Epitaxial Layers

Journal article (2009)

Authors

M Popadic Electronic Components, Technology and Materials
T.L.M. Scholtes Electronic Components, Technology and Materials
W.B. de Boer Electronic Components, Technology and Materials, Old - EWI Sect. ECTM
F Sarubbi Electronic Components, Technology and Materials
L.K. Nanver Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2009

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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