Agglomeration of amorphous silicon film with high energy density excimer laser irradiation

He, M; Ishihara, R; Metselaar, JW; Beenakker, C. W J

Agglomeration of amorphous silicon film with high energy density excimer laser irradiation

Journal article (2007)

Authors

M He Electronic Components, Technology and Materials

R Ishihara Electronic Components, Technology and Materials

JW Metselaar Electronic Components, Technology and Materials

C. W J Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2007

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Research Group

Electronic Components, Technology and Materials

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