Complex roughening of Si under oblique bombardment by low-energy oxygen ions.

Journal article (2000)

Authors

P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
ZX Jiang External organisation
Research Group
Old - sect Electronic Materials (NS/EM)
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - sect Electronic Materials (NS/EM)