Interface roughness in Mo/Si multilayers

Nedelcu, I; van de Kruijs, RWE; Yakshin, AE; Tichelaar, F.D.; Zoethout, E; Louis, E; Enkisch, H; Muellender, S; Bijkerk, F

Interface roughness in Mo/Si multilayers

Journal article (2006)

Authors

I Nedelcu External organisation

RWE van de Kruijs External organisation

AE Yakshin External organisation

F.D. Tichelaar

E Zoethout External organisation

E Louis External organisation

H Enkisch External organisation

S Muellender External organisation

F Bijkerk External organisation

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Published Date

2006

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