Reflection Ptychography via Auto Differentiation on a High Harmonic EUV beamline

Conference paper (2022)

Authors

S. Weerdenburg ImPhys/Coene group - AS
Y. Shao ImPhys/Optics - AS
Jacob Seifert Debye Institute
R.C. Horsten ImPhys/Optics - AS
W.M.J.M. Coene ASML, ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
Copyright: © 2022 S. Weerdenburg, Y. Shao, Jacob Seifert, R.C. Horsten, W.M.J.M. Coene
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Published Date

2022

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Abstract

We demonstrate our beamline using a table-top HHG EUV source for lensless imaging application in reflection m ode. T he s ample r eflection fu nction is reconstructed using an auto-differentiation based ptychographic algorithm built on TensorFlow platform.

Files

EUVXRAY_2022_EW4A.2.pdf
(pdf | 1.22 Mb)
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