Integrated piezoresistive force and position detection sensors for micro-handling applications

Wei, J.; Porta, M; Tichem, M.; Staufer, U.; Sarro, Pasqualina M

Integrated piezoresistive force and position detection sensors for micro-handling applications

Journal article (2013)

Authors

J. Wei Electronic Components, Technology and Materials -

M Porta Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:909ced7c-3c61-4eb6-a737-bb815599dfcd

More Info

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials