Coherent Fourier Scatterometry for detection of nanometer-sized particles on a planar substrate surface.

Roy, S.; da Costa Assafrao, A.; Pereira, S. F.; Urbach, HP

Coherent Fourier Scatterometry for detection of nanometer-sized particles on a planar substrate surface.

Journal article (2014)

Authors

S. Roy ImPhys/Optics

A. da Costa Assafrao ImPhys/Optics

S. F. Pereira ImPhys/Optics

HP Urbach ImPhys/Optics

Research Group

ImPhys/Optics

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Published Date

2014

Language

English

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Research Group

ImPhys/Optics

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