Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik

Journal article (2015)

Authors

Markus Thier Technische Universität Wien

R. Saathof Technische Universität Wien, Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Ernst Csencsics Technische Universität Wien

Reinhard Hainisch Technische Universität Wien

Andreas Sinn Technische Universität Wien

G Schitter Technische Universität Wien, Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Space Systems Egineering

Instrumentation Precision positioning In-process measurement Precision measurement

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Published Date

2015

Language

German

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Research Group

Space Systems Egineering

Abstract

Mechanical vibrations occuring in a production environment cause a relative motion between the sample and inspection tool that distorts measurements at the nanometer level. To overcome this problem, this paper proposes a metrology platform that maintains a constant relative distance to the sample by means of an H& inf;-feedback controller. Experiments in one degree of freedom show that the metrology platform can reduce vibrations as they occur in a production environment by one order of magnitude. Therefore, it enables in-line surface metrology at the nanometer level.