A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

Conference paper (2006)

Authors

H.W. Zeijl Electronic Components, Technology and Materials
SL Paalvast Mechatronic Systems Design
P. M. Sarro Electronic Components, Technology and Materials
J van Eijk Mechatronic Systems Design
Research Group
Electronic Components, Technology and Materials
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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