A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

Journal article (2018)

Authors

A. Jovic EKL Processing -

G. Pandraud EKL Processing -

Nuria Sanchez MedLumics

Juan Sancho MedLumics

Kirill Zinoviev IMEC

Jose L. Rubio MedLumics

E Margallo Balbas MedLumics

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

EKL Processing () (TU Delft)

DOI: https://doi.org/10.1109/JMEMS.2018.2802321

Al-SiO bimorph beam Integrated OCT MEMS actuators

To reference this document use:

http://resolver.tudelft.nl/uuid:824bf8c3-0818-41a2-ab32-2a984552a6bb

More Info

expand_more

Published Date

2018

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Else Kooi Laboratory

Research Group

EKL Processing

Abstract

In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm², this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.

Files

A_MEMS_Actuator_System_for_an_... (pdf)

(pdf | 3.6 Mb)

- Embargo expired in 02-08-2021