Surface-passivated high-resistivity silicon as a true microwave substrate

Spirito, M; De Paola, FM; Nanver, L.K.; Valletta, E; Rong, B; Rejaei, B; De Vreede, Leo; Burghartz, JN

Surface-passivated high-resistivity silicon as a true microwave substrate

Journal article (2005)

Authors

M Spirito Old - EWI Ch. Integrated Sensing Devices

FM De Paola Microelectronics

L.K. Nanver Electronic Components, Technology and Materials

E Valletta Old - EWI Ch. Integrated Sensing Devices

B Rong Old - EWI Ch. Integrated Sensing Devices

B Rejaei External organisation

Leo De Vreede Old - EWI Ch. Integrated Sensing Devices

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Old - EWI Ch. Integrated Sensing Devices

Elektrotechniek Techniek

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Published Date

2005

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Research Group

Old - EWI Ch. Integrated Sensing Devices

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