A 80nm thick silicon nanosheet FET for sensing applications

Conference paper (2010)

Authors

T.S.Y. Moh OLD ChemE/Organic Materials and Interfaces
G. Pandraud Electronic Components, Technology and Materials
HD Tong External organisation
Louis C P M De Smet OLD ChemE/Organic Materials and Interfaces
Ernst J.R. Sudholter OLD ChemE/Organic Materials and Interfaces
c Rijn External organisation
Pasqualina M. Sarro Electronic Components, Technology and Materials
Research Group
OLD ChemE/Organic Materials and Interfaces
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Published Date

2010

Language

English

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Research Group

OLD ChemE/Organic Materials and Interfaces

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