A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

Santagata, F.; Iervolino, E.; Laros, J.M.W.; Groeneweg, J.; Creemer, J.F.; van Herwaarden, AW; Sarro, Pasqualina M

A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

Conference paper (2010)

Authors

F. Santagata Electronic Components, Technology and Materials -

E. Iervolino Old - EWI Sect. ECTM

J.M.W. Laros Electronic Components, Technology and Materials -

J. Groeneweg Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

AW van Herwaarden External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:79e65702-61b2-46ad-bd06-7fd3015940e3

More Info

expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials