A molybdenum MEMS microhotplate for high-temperature operation

Mele, L.; Santagata, F.; Iervolino, E; Mihailovic, M.; Rossi, T; Tran, A.T.; Schellevis, H.; Creemer, J.F.; Sarro, Lina

A molybdenum MEMS microhotplate for high-temperature operation

Journal article (2012)

Authors

L. Mele Electronic Components, Technology and Materials -

F. Santagata Electronic Components, Technology and Materials -

E Iervolino External organisation

M. Mihailovic Electronic Components, Technology and Materials -

T Rossi External organisation

A.T. Tran Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Lina Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials