Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

Mullerova, J; ¿utta, P; van Elzakker, G; Zeman, M.; Mikula, M

Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

Journal article (2007)

Authors

J Mullerova External organisation

P ¿utta External organisation

G van Elzakker Electronic Components, Technology and Materials -

M. Zeman Electronic Components, Technology and Materials -

M Mikula External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:74df3b12-e115-4d0d-b2d4-0a66712391ee

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials