Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes

Conference paper (2005)

Authors

H. Schellevis Electronic Components, Technology and Materials - EEMCS
L. La Spina Electronic Components, Technology and Materials - EEMCS
N Nenadovic Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials