Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications

Fiorentino, G.; Syed, W.H.; Adam, Aurele; Neto, Andrea; Sarro, Pasqualina M

Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications

Journal article (2014)

Authors

G. Fiorentino Electronic Components, Technology and Materials -

W.H. Syed Tera-Hertz Sensing -

Aurele Adam ImPhys/Optics -

Andrea Neto Tera-Hertz Sensing -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:6f3abc79-17b2-4f51-a938-07811a18a31c

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Published Date

2014

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials