Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications

Journal article (2014)

Authors

G. Fiorentino Electronic Components, Technology and Materials - EEMCS
W.H. Syed Tera-Hertz Sensing - EEMCS
A.J.L. Adam ImPhys/Optics - AS
A. Neto Tera-Hertz Sensing - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2014

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials