Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

Moh, T.S.Y.; Pandraud, G.; de Smet, L.C.P.M.; van Rijn, C.; Sudhölter,  Ernst J. R.; Sarro, Pasqualina M

Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

Poster (2011)

Authors

T.S.Y. Moh OLD ChemE/Organic Materials and Interfaces

G. Pandraud Electronic Components, Technology and Materials -

L.C.P.M. de Smet OLD ChemE/Organic Materials and Interfaces

C. van Rijn External organisation

Ernst J. R. Sudhölter OLD ChemE/Organic Materials and Interfaces

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

OLD ChemE/Organic Materials and Interfaces

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Published Date

2011

Language

English

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Research Group

OLD ChemE/Organic Materials and Interfaces