Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

Moh, T.S.Y.; Pandraud, G.; de Smet, Louis; van Rijn, C.; Sudhölter, E.J.R.; Sarro, P. M.

Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

Poster (2011)

Authors

T.S.Y. Moh OLD ChemE/Organic Materials and Interfaces

G. Pandraud Electronic Components, Technology and Materials

Louis de Smet OLD ChemE/Organic Materials and Interfaces

C. van Rijn External organisation

E.J.R. Sudhölter OLD ChemE/Organic Materials and Interfaces

P. M. Sarro Electronic Components, Technology and Materials

Research Group

OLD ChemE/Organic Materials and Interfaces

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Published Date

2011

Language

English

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Research Group

OLD ChemE/Organic Materials and Interfaces

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