A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

Pandraud, G.; Purniawan, A; Margallo-Balbás, E; Sarro, Pasqualina M

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

Conference paper (2012)

Authors

G. Pandraud Electronic Components, Technology and Materials

A Purniawan Electronic Instrumentation

E Margallo-Balbás External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2012

Language

English

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Research Group

Electronic Components, Technology and Materials

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