<100>textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

Journal article (2006)

Authors

M He Electronic Components, Technology and Materials
R Ishihara Electronic Components, Technology and Materials
JW Metselaar Electronic Components, Technology and Materials
C. W J Beenakker Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials