Monocrystalline Si-based microhotplate heater

Mihailovic, M.; Creemer, J.F.; Sarro, Pasqualina M

Monocrystalline Si-based microhotplate heater

Conference paper (2007)

Authors

M. Mihailovic Electronic Components, Technology and Materials -

J.F. Creemer Old - EWI Sect. ECTM

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:6577341e-b445-443e-b957-7817da6a72c6

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials