Improved in plane thermal folded V-beam actuator for optical fibre alignment

Henneken, VA; Sassen, WP; Tichem, M.; Sarro, Pasqualina M

Improved in plane thermal folded V-beam actuator for optical fibre alignment

Journal article (2008)

Authors

VA Henneken Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

WP Sassen Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:650a284d-5f76-4276-a07a-0aedaf983fb7

More Info

expand_more

Published Date

2008

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering