Growth of multi-layered graphene on molybdenum catalyst by solid phase reaction with amorphous carbon

Journal article (2019)

Authors

F. Ricciardella Electronic Components, Technology and Materials - EEMCS
S. Vollebregt Electronic Components, Technology and Materials - EEMCS
A.J.M. Giesbers Philips Innovation Services
M. Ahmadi QN/Zandbergen Lab , Kavli institute of nanoscience Delft
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2019 F. Ricciardella, S. Vollebregt, Evgenia Kurganova, A.J.M. Giesbers, M. Ahmadi, Pasqualina M Sarro
DOI: https://doi.org/10.1088/2053-1583/ab1518
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Published Date

2019

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract


A method to grow multi layers graphene (MLG) just by thermal annealing in an inert atmosphere is reported. A molybdenum (Mo) catalyst layer is used in combination with a solid amorphous carbon (a-C) source on top or below the Mo layer. The formation of MLG directly on top of the catalyst substrate surface is confirmed by Raman spectroscopy, atomic force microscopy, cross-section transmission electron microscopy, electron energy loss spectroscopy and x-ray photoelectron spectroscopy. Growth of MLG on top of the Mo catalyst is demonstrated both with a-C below and above the Mo layer. The growth mechanism is attributed to the diffusion of a-C through the Mo layer and precipitation into the graphene at the surface, similar to the growth by chemical vapour deposition (CVD) on a Ni catalyst. The role of the inert Ar/H
2
atmosphere, carbon thickness, catalyst thickness, anneal time and anneal temperature are reported. Fast growth of MLG (5 min) at 915 °C is demonstrated. The quality of MLG prepared by thermal annealing is at least as good as that of MLG synthesized by CVD. The relevant achievements presented in this study make the proposed technique a promising alternative to CVD based MLG.

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