Determination of the full scattering matrix using coherent Fourier scatterometry

Journal article (2016)

Authors

N. Kumar ImPhys/Optics - AS
L. Cisotto ImPhys/Optics - AS
S Roy ImPhys/Optics - AS
S.F. Pereira ImPhys/Optics - AS
H. P. Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
expand_more

Published Date

01-06-2016

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Abstract

We demonstrate a method to obtain within an arbitrary numerical aperture (NA) the entire scattering matrix of a scatterer by using focused beam coherent Fourier scatterometry. The far-field intensities of all scattered angles within the NA of the optical system are obtained in one shot. The corresponding phases of the field are obtained by an interferometric configuration. This method enables the retrieval of the maximum available information about the scatterer from scattered far-field data contained in the given NA of the system.