Stiction-driven sealing of surface micromachined channels

Morana, B.; Pandraud, G.; Santagata, F.; Creemer, J.F.; Sarro, Pasqualina M.

Stiction-driven sealing of surface micromachined channels

Conference paper (2012)

Authors

B. Morana Electronic Components, Technology and Materials -

G. Pandraud Electronic Components, Technology and Materials -

F. Santagata Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M. Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials