Silicon-based MEMS micro-evaporator

Conference paper (2009)

Authors

J Hao External organisation
M. Mihailovic Electronic Components, Technology and Materials - EEMCS
CM Rops Fluid Mechanics - Mechanical, Maritime and Materials Engineering
J.F. Creemer Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials