Silicon-based MEMS micro-evaporator

Hao, J; Mihailovic, M.; Rops, CM; Creemer, J.F.; Sarro, Lina

Silicon-based MEMS micro-evaporator

Conference paper (2009)

Authors

J Hao External organisation

M. Mihailovic Electronic Components, Technology and Materials -

CM Rops Fluid Mechanics - Mechanical, Maritime and Materials Engineering

J.F. Creemer Electronic Components, Technology and Materials -

Lina Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials