Novel post-etching treatment of small windows in oxide for selective epitaxial growth

Maes, JWH; Caro, J.; Visser, CCG; Zijlstra, T; van der Drift, E.W.J.M.; Radelaar, S; Tichelaar, F.D.; Fakkeldij, EJM

Novel post-etching treatment of small windows in oxide for selective epitaxial growth

Journal article (1997)

Authors

JWH Maes Old organisation TN/TechnischeNatuurkunde voorm

J. Caro QN/Fysics of NanoElectronics

CCG Visser External organisation

T Zijlstra QN/Kavli Nanolab Delft

E.W.J.M. van der Drift QN/Kavli Nanolab Delft

S Radelaar OLD Metals Processing, Microstructures and Properties

F.D. Tichelaar OLD Virtual Materials and Mechanics

EJM Fakkeldij External organisation

Department

Old organisation TN/TechnischeNatuurkunde voorm

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Published Date

1997

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Department

Old organisation TN/TechnischeNatuurkunde voorm

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