Demonstration of PECVD SiC-SiO2-SiC horizontal slot waveguides

Pandraud, G.; Neira, AB; Margallo Balbas, E; Yang, C.; Sarro, Pasqualina M

Demonstration of PECVD SiC-SiO2-SiC horizontal slot waveguides

Journal article (2010)

Authors

G. Pandraud Electronic Components, Technology and Materials

AB Neira External organisation

E Margallo Balbas Electronic Instrumentation

C. Yang Electronic Instrumentation

Pasqualina M Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2010

Language

English

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Research Group

Electronic Components, Technology and Materials