Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

Vollebregt, S; Chiaramonti, AN; van der Cingel, J.; Beenakker, C. W J; Ishihara, R.

Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

Journal article (2013)

Authors

S Vollebregt Electronic Components, Technology and Materials

AN Chiaramonti External organisation

J. van der Cingel Electronic Components, Technology and Materials

C. W J Beenakker Electronic Components, Technology and Materials

R. Ishihara Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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