DRIE assisted HAR MEMS processing of inertial sensors and actuators

Conference paper (2007)

Authors

V. Rajaraman Electronic Instrumentation - EEMCS
SL Paalvast Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
G Craciun Electronic Instrumentation - EEMCS
J.C. Wolff Old - EWI Ch. Integrated Sensing Devices
K.A.A. Makinwa Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation