High sensitive/wide dynamic range, field emission pressure sensor based on fully embedded CNTs

Journal article (2014)

Authors

S. Taak University of Tehran
S. Rajabali University of Tehran
S. Darbari Tarbiat Modares University
Shams Mohajerzadeh University of Tehran
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Published Date

2014

Language

English

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Abstract

The formation of high sensitivity-wide dynamic range field emission pressure sensors based on carbon nanotubes (CNTs) is reported. In this work, CNTs are grown inside an array of micromachined holes in order to ensure a high sensitivity and a wide dynamic range by allowing anode-cathode proximity while preventing anode-cathode direct contact simultaneously. External pressure is applied to a Si-based flexible anode, which results in consequent variations in emission current, due to electric field changes. Microcavities in this structure have been formed by a Si deep vertical etching process, while the CNTs have been grown by direct current plasma-enhanced chemical vapour deposition. Also, it is demonstrated that a similar fabrication process can be applied to implement a device with an electrically controllable emission current. A high sensitivity of 1.5-13.7 μA kPa-1 (with Vanode/cathode < 100 V) within a dynamic range from around 0.1 to 1 GPa, is measured in this experiment.