Fabrication of through-substrate cavities for hybrid wafer-level packaging

Conference paper (2006)

Authors

S Sosin Old - EWI Ch. Integrated Sensing Devices
J. Tian Old - EWI Ch. Integrated Sensing Devices
L Wang Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M Bartek Old - EWI Ch. Integrated Sensing Devices
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices