Thermally regenerable optical transparent MEMS windows for exhaust gas analysis

Conference paper (2020)

Authors

M. Ghaderi Electronic Instrumentation - EEMCS , Chalmers University of Technology
L.M. Middelburg Electronic Components, Technology and Materials - EEMCS
David Bilby Ford Motor Company
Jaco Visser Ford Motor Company
Per Lundgren Chalmers University of Technology
Peter Enoksson Chalmers University of Technology
R.F. Wolffenbuttel Chalmers University of Technology, Electronic Instrumentation - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2020

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Exhaust gas measurement in the harsh environment of the tailpipe by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of soot. The design, fabrication, and testing of membranes in SiC-on-Si with integrated heaters to serve as a regenerable MEMS optical window into the tailpipe are presented. Membranes at slightly elevated temperatures are demonstrated to keep the surface transparent by thermophoresis, while surface regeneration is achieved at pulsed high temperatures, which allows long-term optical measurement in the exhaust.