Ge-on-Si: Single-crystal selective epitaxial growth in a CVD reactor

Conference paper (2012)

Authors

A Sammak Electronic Components, Technology and Materials
W.B. de Boer Old - EWI Sect. ECTM
L.K. Nanver Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2012

Language

English

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Research Group

Electronic Components, Technology and Materials

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