Effect of undercut on the resonant behaviour of silicon nitride cantilevers

Journal article (2009)

Authors

K Babaei Gavan QN/Mol. Electronics & Devices
EWJM van der Drift QN/Kavli Nanolab Delft
WJ Venstra QN/Mol. Electronics & Devices
M.R. Zuiddam QN/Kavli Nanolab Delft
H. S J van der Zant QN/Mol. Electronics & Devices
Research Group
QN/Mol. Electronics & Devices
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Published Date

2009

Language

Undefined/Unknown

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Research Group

QN/Mol. Electronics & Devices

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